![]() ![]() ![]() Ingle Xinyua Xia Zheng Yuan Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Lifetime Application number US10/979,471 Other versions US20050064730A1 Google Patents Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fillÄownload PDF Info Publication number US7037859B2 US7037859B2 US10/979,471 US97947104A US7037859B2 US 7037859 B2 US7037859 B2 US 7037859B2 US 97947104 A US97947104 A US 97947104A US 7037859 B2 US7037859 B2 US 7037859B2 Authority US United States Prior art keywords gas silicon flow providing chamber Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US7037859B2 - Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill US7037859B2 - Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill ![]()
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